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| Semiconductor Processing & Plasma Modeling |
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ESI experts will guide you through the theory and application of an industrial solution that takes advantage of the ACE+ Suite of simulation tools.
You will leave the seminar ready to explore the world of multiphysics available in the ACE+ Suite. Computers will be available to use, or bring your own, and we will install a trial license for you at no charge. Overviews and tutorials can be explored at your own pace during the hands-on session afterward with the helpful guidance of an ESI application engineer.
The emphasis of this event will be on semiconductor processing and plasma applications, however those interested in CFD simulation in any field are welcome.
Standard applications include:
- Reactor chamber flow and heat analysis
- Showerhead design
- Feature-scale evolution
- Plasma enhanced processes
- Rapid thermal processing
- Etching & electroplating
- Deposition (CVD, PVD, ALD)
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