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CFD-PLASMA-2002
Posted Mon April 01, 2002 @02:20PM
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News CFDRC, world leader in computational fluid dynamics and plasma simulations, announces the release of CFD-PLASMA-2002, a comprehensive software tool for plasma engineering.

CFD-PLASMA-2002 offers:

  • Comprehensive fluid model for 3D simulations of Inductively Coupled Plasmas (ICP), Capacitively Coupled Plasmas (CCP) and direct current (DC) discharges for a variety of applications that include pulsed, atmospheric and multi-frequency discharges
  • Full 3D Maxwell solver and advanced Filament model for simulations of electromagnetic fields in complex coil configurations in time and frequency domains
  • Deterministic Boltzmann solver for simulations of non-local Electron Energy Distribution Functions (EEDF) and electron induced reaction rates
  • Enhanced Chemistry Models and Expanded Database for Gas Mixtures commonly used in Semiconductor Manufacturing
  • Interface to feature scale simulators SPEEDIE and EVOLVE for semiconductor manufacturing applications
  • Expanded set of eight tutorials and a dozen of demonstration problems for a variety of applications including semiconductor manufacturing, lighting, feature scale etch, multi-frequency CCP, Plasma Display Panels, and thermal plasmas (arcs & torches)
  • Interface to Matematica 4 -for advanced analysis and post-processing of results

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    Bundled with a new set of extended tutorial materials, the software can be used for CAD of Industrial Plasma Systems and as a supplement for University based undergraduate or graduate classes on Plasma Engineering. CFDRC had developed a comprehensive set of plasma engineering training materials that utilize CFD-PLASMA and include some 16 case studies and plasma engineering and modeling theory overview. CFDRC also offers advanced Plasma Course for Industrial Engineers based on CFD-PLASMA2002.

    Current Research and Development efforts focus on:

  • Magnetic field effects on electron transport (code development: implement tensor properties for electron mobility and diffusion)
  • Monte Carlo module for ions and neutrals for advanced pre-sheath models and feature scale simulations
  • Electron Boltzmann solver fully coupled with other modules for ICP, CCP & DC simulations
  • Beta release of the elliptic solver
  • Interface to SPICE for external circuit simulations coupled with reactor scale simulations
  • Expanded Property Databases and Plasma Chemistry Libraries
  • Coupled solvers (Poisson, n_e and T_e solved simultaneously for CCP simulations electron inertia effects)
  • Plasma radiation transport module development
  • Kinetic module applied to simulations of electron transport in semiconductors
  • Consolidate electrostatic module (div sigma grad phi = 0 and div eps grad phi = q solved simultaneously for simulations of conductors and insulators)
  • Thermal plasmas. Plasma arc validation studies and demos .
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