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CFD Seminar for Semiconductor Applications
Posted Tue July 17, 2007 @09:19AM
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News ESI Group is pleased to invite you for a FREE Seminar on Software Modeling Solutions for Semiconductor Equipment and Processes.

The Seminar is held on July 18th and is hosted along with the Semicon West 2007 show at San Francisco. The seminar features three seperate sessions on reactor modeling, 3D feature evolution modeling and vibroacoustics.

Sponsor CFD Review

Seminar 1: Reactor Modeling
  • Model CVD reactors including MOCVD, APCVD, LPCVD, PECVD, IMPVD, ALD and RTP
  • Simulate transport of multi-component species with associated gas/surface reactions
  • Model semiconductor plasmas including:ICP,CCP,DCP etc

    Seminar2 : 3D Feature Evolution Modeling

  • Accurately simulate 2D and 3D shape evaluation
  • Efficiently enhance conformality of deposited films
  • Coupled with reactor scale modeling for input flux condition

    Seminar3: Vibroacoustics

  • FE/BEM deterministic models for low frequency design
  • SEA models for high and mid frequency design
  • Unique hybrid model to accurately simulate across entire frequency spectrum After the seminar, you will learn how to maximize your wafer yield and improve deposition uniformity by implementing Computational Fluid Dynamics in your design process.

    Come and discover our latest solutions to meet your multiphysics simulation needs!

    Register Now for your chance to win an exciting prize!

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  • ESI Group
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