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CFD Seminar for Semiconductor Applications |
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Posted Tue July 17, 2007 @09:19AM
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Seminar 1: Reactor Modeling
Model CVD reactors including MOCVD, APCVD, LPCVD, PECVD, IMPVD, ALD and RTP
Simulate transport of multi-component species with associated gas/surface reactions
Model semiconductor plasmas including:ICP,CCP,DCP etc
Seminar2 : 3D Feature Evolution Modeling
Accurately simulate 2D and 3D shape evaluation
Efficiently enhance conformality of deposited films
Coupled with reactor scale modeling for input flux condition
Seminar3: Vibroacoustics
FE/BEM deterministic models for low frequency design
SEA models for high and mid frequency design
Unique hybrid model to accurately simulate across entire frequency spectrum
After the seminar, you will learn how to maximize your wafer yield and improve deposition uniformity by implementing Computational Fluid Dynamics in your design process.
Come and discover our latest solutions to meet your multiphysics simulation needs!
Register Now for your chance to win an exciting prize!
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