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Analyzing Air Flow in Semiconductor Manufacturing Equipment

	Posted Tue December 01, 2015 @10:15PM
	The Hirata Corporation designs, engineers, and produces manufacturing production systems. They used Cradle scSTREAM to analyze the air flow in semiconductor wafer manufacturing equipment where the production space must be kept absolutely clean. In this narrated interview [pdf], Takahiro Motoyama and Michitaka Matsumura from the Development Division at the Hirata Corporation discuss how Cradle scSTREAM CFD simulations were used to investigate nitrogen dispersion for preventing semiconductor wafer oxidation during transport.

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	Cradle Hirata Corporation interview [pdf] scSTREAM More on Application